JPH0214361U - - Google Patents
Info
- Publication number
- JPH0214361U JPH0214361U JP9086488U JP9086488U JPH0214361U JP H0214361 U JPH0214361 U JP H0214361U JP 9086488 U JP9086488 U JP 9086488U JP 9086488 U JP9086488 U JP 9086488U JP H0214361 U JPH0214361 U JP H0214361U
- Authority
- JP
- Japan
- Prior art keywords
- rotating
- rotating plate
- fixed
- substrate holder
- rotation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 238000010586 diagram Methods 0.000 description 2
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086488U JPH0214361U (en]) | 1988-07-08 | 1988-07-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9086488U JPH0214361U (en]) | 1988-07-08 | 1988-07-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0214361U true JPH0214361U (en]) | 1990-01-29 |
Family
ID=31315373
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9086488U Pending JPH0214361U (en]) | 1988-07-08 | 1988-07-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0214361U (en]) |
-
1988
- 1988-07-08 JP JP9086488U patent/JPH0214361U/ja active Pending